Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production.

  • Plasma Etch & Deposition
  • Atomic Layer Deposition
  • Ion Beam Etch & Deposition
  • Deep Silicon Etch
  • Physical Vapour Deposition

Email: plasmainfo@oxinst.com

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  • Plasma Technology

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