Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production.
Markets:
- Semiconductor materials and process research: academic and corporate
- Production processes: High Brightness Light Emitting Diodes
(HBLEDs), Infra Red sensors, Failure Analysis de-processing, Photovoltaics, and more...
Technologies:
- Plasma Etch and Deposition
- Atomic Layer Deposition (ALD)
- Hydride Vapour Phase Epitaxy
- Ion Beam Etch and Deposition
- Nanoscale Growth Systems
Plasma Technology Product information...
Customer Support
Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world-class products, complemented by world-class service and support.
Customer Support information...