Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production. We specialise in three main areas:
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RIE, ICP, DRIE, RIE/PE, Ion Beam
PECVD, ICP CVD, Nanofab, ALD, PVD, IBD
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Customer Support
Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world-class products, complemented by world-class service and support.