INCAEnergy
provides two tools you can use to check the accuracy of element
identification.
These tools are found on the 'Confirm Elements' screen in the Point&ID
or Analyzer navigators.
They are:
1.
Check Total
2.
Spectrum Reconstruction Overlay
To
enable these tools, simply check the 'Overlay Spectrum Reconstruction'
box, or select Reconstruction in the 'Overlay' drop down, situated
in the top left corner of the 'Confirm Elements' screen.

Check
Total gives a number in %. If the number is less than 80% or greater
than 120% then there is a possible problem with the spectrum collected
or the elements identified. This could be:
1.
A major peak in the spectrum is incorrectly identified
2. The sample is charging
3. The area being analysed is not homogeneous
4. The kV saved with the spectrum is not correct
Therefore
if the check total is outside the optimum range (80%-120%), check
the accuracy of the element identification.
This is a simple task using the Spectrum Overlay tool.
Spectrum overlay is a red line spectrum, which is overlaid onto
your spectrum. It shows what the spectrum should look like based
on the elements identified. If these elements are not correct then
there will be a bad match between the spectrum and the red overlay.
One Example - KBr (Potassium Bromide)
KBr was one sample for which the EDS systems tested by Dr. Newbury
had difficulty identifying the elements correctly. This was because
the autoID routines tested could not always differentiate between
Br and Al. The autoID function in INCAEnergy correctly
identifies K and Br, however, for the sake of this discussion, assume
that the peaks were misidentified manually by the operator.
With INCAEnergy it is easy to see that Br has been
misidentified as Al when analysing KBr. As shown in the image below:

1.
The check total is less than 80% (only 37%), therefore you should
check the overlay
2. The overlay on the peak labelled Al does not fit well, particularly
the small peak to the left of the peak labelled Al is not shown
by the overlay at all.
If
there is a major error in the element identification of a spectrum,
using the check total and spectrum overlay tools will quickly show
the problem.
A correctly identified KBr spectrum is shown in the image below,
as determined using the INCAEnergy AutoID software.

Conclusion
The conclusion we can take from Dr. Newbury's paper is that:
- Not
all EDS systems are capable of performing even the basic demands
of the EDS user i.e. identifying elements correctly.
- However,
as
INCAEnergy users you can be confident that the
results obtained from your INCAEnergy system are accurate and
of the highest quality.
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