Cryo-Plex 10 Cryopump

Cryoplex 10 Cryopump

Generally considered the most efficient cryopump design the 10” ANSI / 14” OD Conflat achieving double the gas and water volume of the CP-8 cryopump, providing clean, oil free high vacuum pumping solutions. .

Standard applications: Semiconductor, Aerospace & vacuum coating as well as R&D.

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  • Specification 
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Flexible Configurations

Standard inlet array configurations available as ANSI, ISO,Conflat ® and full UHV.

Power a single or two CryoPlex – 10 cryopumps with the M600 Helium Compressor reducing space, power and maintenance making this and ideal package for large chamber applications requiring multiple cryopumps.

Industry Standard Designs

Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr ® line of cryopumps and compressors making upgrades and repair exchanges seamless.

Cryo-Plex 10 - Gas pumping speeds liters/second  
   Air

 3,000

   Water

  9,000

   Hydrogen

  5,000

   Argon

  2,500

Gas capacities - standard liters @ 5x10-6 Torr  
   Hydrogen

      24

   Argon

  2,000

Throughput  
   Argon sccm

  1,500

Crossover  
   Torr-liters

    300

Cool down time  
   60 Hertz

 60 Min

Cryopump measurements  
   Height

 23.9"

 Weight LBS

85

Inlet flange

ANSI/ISO/CF    

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