Cryo-Plex 16 Cryopump

Cryoplex 16 cryopump

Standard cryopump in use on larger box-coating systems, space simulation chambers, electron beam coating systems requiring clean, oil free high vacuum pumping solutions. 

  • Additional Information 
  • Specification 
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Flexible Configurations

Standard inlet array configurations available as ISO,CVC

Industry Standard Designs

Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr ® line of cryopumps and compressors making upgrades and repair exchanges seamless.

 Cryo-Plex 16  
 Gas pumping speeds - liters/second  

    Water

 16,000

    Air

 5,000

    Hydrogen

 5,000

    Argon

 4,200

 Gas capacities - standard liters @ 5x10-6 Torr  
    Hydrogen

 15

    Argon

 2,500

 Throughput  
    Argon sccm

 500

 Crossover  
    Torr-lites

 300

 Cool down time  
    60 Hertz

 150 min

 Cryopump measurements  
    Height

 24"

    Length

 22.6"

Inlet flange

ISO/CVC

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Related Products

Cryo-Plex 8 Cryopump
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Cryo-Plex 8LP Cryopump
Standard cryopump configuration for semiconductor tools
Cryo-Plex 10 Cryopump
Generally considered the most efficient cryopump design

Downloads And Links
Austin brochure
Cryopumps and Helium Compressors