Cryo-Plex 8LP (low profile) Cryopump

Cryoplex 8LP

Standard cryopump configuration for semiconductor tools the CryoPlex 8LP is ideal for space constrained applications requiring clean, oil free high vacuum pumping solutions.

  • Additional Information 
  • Specification 
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Industry Standard Designs

Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr ® line of cryopumps and compressors making upgrades and repair exchanges seamless.

Flexible Configurations

Standard cryopump inlet array configurations ANSI, ISO,Conflat ®

 Cryo-Plex 8LP  
 Gas Pumping speeds - liters/second  
    Water

4,000

    Air

1,500

    Hydrogen

2,200

    Argon

1,200

 Gas capacities - standard liters @ 5x10-6 Torr  
    Hydrogen

12

    Argon

1,000

 Throughput

 

    Argon sccm

700

 Crossover  
    Torr-liters

 150

 Cool down time  
    60 Hertz

90 min

 Cryopump measurements  
    Height

7.03"

    Length

 22.6"

    Weight LBS

 42

Inlet flange

ANSI/ISO/CF

   
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Related Products

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Cryo-Plex 16 Cryopump
Standard cryopump in use on larger box-coating systems

Downloads And Links
Austin brochure
Cryopumps and Helium Compressors
Cryopump Catalogue
On-line catalogue offers an extensive range of cryopumps and compressors, spare parts, accessories and consumables