Remote plasma & thermal ALD in one flexible tool

The FlexAL® systems provide a new range of flexibility and capability in the engineering of nanoscale structures and devices by offering remote plasma atomic layer deposition (ALD) processes and thermal ALD within a single ALD system.

Product features
  • Remote plasma & thermal ALD in one flexible tool
  • Automated 200mm load lock for process flexibility
  • Maximum flexibility in the choice of materials and precursors
  • Low-temperature processes enabled by plasma ALD
  • Low damage maintained by the use of remote plasma
  • Controllable, repeatable processes via recipe-driven software interface
  • Ability to handle from small wafer pieces up to full 200mm wafers
  • Load-locked wafer entry for low particle count and short loading-to-process-start time
  • Integral glove box on precursor modules for in-situ change-over
  • Integral ports to allow the addition of in-situ ellipsometry measurement tools
  • May be integrated in cluster system with other process tools, including Oxford Instruments PlasmaPro 100 range of etch and deposition tools
  • Licensed technology from ASM International NV
  • Clusterable for vacuum transfer of substrates
  • Cassette to cassette handling increases throughput suitable for production
  • Hex handler with robot and 25 wafer cassette for 100mm, 150mm or 200mm wafers (no tools required to swap between wafers)
  • All configurations can be located entirely within the cleanroom or through-the-wall

Download the brochure...

ALD Brochure

Atomic layer deposition process solutions

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Related Process Techniques

Atomic Layer Deposition (ALD)

Atomic Layer Deposition (ALD)

Atomic layer deposition (ALD) Oxford Instruments' ALD systems include the FlexAL and the OpAL.

Related Tools



Open loaded thermal ALD tool with plasma option

Tool Support

Flexible Support Agreements

Flexible Support Agreements

Tailored Service Contracts: Choose options that suit you

Pre-Purchased Service Fund

Pre-Purchased Service Fund

Our Pre-Purchased Services Fund gives you 10% more spending power