Applications & Markets

Display & Lighting from OIPT:

Applications include signage, architectural lighting, image projection, automotive, and domestic lighting. Technologies can be either emissive (light emitting diodes), or non-emissive (electrophoresis). Applications in which the light is used as a communications media are not included.

• HBLED 

We are playing an increasingly important role in the manufacture of HBLEDs, enabling huge changes in the global lighting industry. Our systems are used by a number of leading HBLED manufacturers to perform this function. As the industry moves on to the larger 4” substrates, it becomes a much more attractive proposition to process single wafers at a time rather than batches.

• Other

Our systems' prime use is for the manufacture or modification of materials or devices, the end use of which is a structure or device which falls witihin the Display and Lighting definition, but is not a HBLED. e.g OLED

We are a leading supplier of plasma process tools, for research into and production of a number of key semiconductor applications -  from silicon based through to compound semiconductors.
 
The markets continue to grow, and there is a trend towards smaller linewidths and higher integration. We have consistently offered class-leading technology to these markets by partnering with its customers to develop innovative process and system solutions.

Key Segments are:

• Failure Analysis - Dry etch wafer de-processing
• MEMS - Processes used for creation and coating of high aspect ratio structures used in an electronics application
• Compound Semiconductor -  Power semiconductors

Photovoltaics - Processes used in the fabrication of photovoltaic solar cells

Photovoltaics (PV) is a key application for renewable energy and energy storage. We have developed a number of processes for the production of Photovoltaics (solar panels) using our flexible and powerful tools and with key technologies.

Processes for PV :

• Atomic Layer Deposition (ALD)
• Physical Vapour Deposition (PVD)
• Plasma Enhanced Chemical Vapour Deposition (PECVD)

With the MEMS industry expected to see double digit growth between 2009 and 20141, the development and commercialisation of new MEMS applications is becoming a reality.

Traditional devices such as accelerometers, gyroscopes and microphones continue to see increased adoption in many consumer electronics, displays and automotive applications. 

The reality is that MEMS can provide a solution where there is a requirement for a device or sensor to be miniaturised2.  Devices emerging in the R&D phase include energy harvesting; speakers; RFID; pico projectors; oscillators; micro fuel cells; and autofocus technologies amongst others3. 

Oxford Instruments Plasma Technology continues to provide technologies that address existing and emerging applications in the MEMS market.  With a broad process and application portfolio our technologies enable many of the applications identified today and those of tomorrow. 
 

Process Technologies solutions in this market sector include:

• Deep silicon etching using a switched (Bosch) process or cryo technology
• Plasma Enhanced Chemical Vapour Deposition (PECVD)
• Atomic Layer Deposition (ALD)
• Magnetron sputter deposition 

1. (isuppli corp Semicon West 2010), 2. (A.M. Fitzgerald and Associates, September 2006), 3. (Yole Developpment Semicon West 2010)