Al Sputter Deposition - Aluminium Sputter Deposition 

The SEM shows Al deposited on 1 : 1
and 2 : 1 aspect ratio Si lines.
There is a continuous metal film on
the walls, even into the notch
at the bottom corners

Al Sputter Deposition - Aluminium Sputter Deposition with excellent step coverage

Related Product: System 400

Technology:
Magnetron Sputtering rotating table

Results:
- rate: 50 nm/ min at 5 kW
- uniformity: +/- 5 % (6” wafer)
- excellent step coverage
- smooth surface