Following the great success of our 2008 Seminars, we have planned a further series this year, in conjunction with various prestigious institutes worldwide.
Our recent seminars at the University of Southampton, UK, and Lawrence Berkeley National Laboratory, CA, USA were a great success, and we have one more currently planned for 2009.
The seminar will have a wide programme, including talks by OIPT applications & development scientists, in addition to key guest speakers and researchers from the host University.
To register for the seminar listed below click here
27-28th August 2009, Eindhoven University, The Netherlands Workshop on Silicon Dry Processing for Nanoelectronics and Micromechanics
Programme:
27th August 2009
| ALD for crystalline solar cells |
Dr Erwin Kessels |
TU, Eindhoven |
| ICP-PECVD, high quality deposition at low temperature |
Dr Owain Thomas |
OIPT |
| Silicon Etching - Deep Si through to nano |
Colin Welch |
OIPT |
| Materials and applications of ALD |
Chris Hodson |
OIPT |
| Dielectric Etching - comparison of RIE and ICP etching |
Colin Welch |
OIPT |
| Cleaning of Plasma Systems |
Dr Owain Thomas |
OIPT |
| Deposition of dielectric films for micro-mechanical devices |
Sandro Jatta |
TU Darmstadt |
| Fabrication of advanced Photonic Integrated Circuits in InGaAsP |
Boudewijn Docter |
TU Eindhoven |
| Poster session, Lab tour & CONFERENCE DINNER |
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28th August 2009
| Improvement in etch processes for III-V applications |
Dr Mark Dineen |
OIPT |
| Improvements in ion beam processing inc SIMS EPD |
Dr Sebastien Pochon |
OIPT |
| Growth of Nanowires and Nanotubes |
Chris Hodson |
OIPT |
| Endpoint detection in plasma systems |
Andy Goodyear |
OIPT |
| Monitoring ALD by Spectroscopy ellipsometry, optical emission spectroscopy and mass spectrometry |
Erik Langereis |
TU Eindhoven |
| Integrated plasma processing simulation framework, linking tool scale plasma models with 2D feature scale etch simulator |
Maik Hauguth |
Uni Ilmenau |
| Plasma control/Diagnostics |
Andy Goodyear |
OIPT |
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To register for any of these seminars click here