Plasma Technology Seminars 2009

OIPT Seminars

 

Following the great success of our 2008 Seminars, we have planned a further series this year, in conjunction with various prestigious institutes worldwide.

Our recent seminars at the University of Southampton, UK, and  Lawrence Berkeley National Laboratory, CA, USA were a great success, and we have one more currently planned for 2009.

The seminar will have a wide programme, including talks by OIPT applications & development scientists, in addition to key guest speakers and researchers from the host University.

To register for the seminar listed below click here 

  

27-28th August 2009, Eindhoven University, The Netherlands                               Workshop on Silicon Dry Processing for Nanoelectronics and Micromechanics

Programme:

27th August 2009

ALD for crystalline solar cells Dr Erwin Kessels TU, Eindhoven
ICP-PECVD, high quality deposition at low temperature Dr Owain Thomas OIPT
Silicon Etching - Deep Si through to nano Colin Welch OIPT
Materials and applications of ALD Chris Hodson OIPT
Dielectric Etching - comparison of RIE and ICP etching Colin Welch OIPT
Cleaning of Plasma Systems Dr Owain Thomas OIPT
Deposition of dielectric films for micro-mechanical devices Sandro Jatta TU Darmstadt
Fabrication of advanced Photonic Integrated Circuits in InGaAsP Boudewijn Docter TU Eindhoven
Poster session, Lab tour & CONFERENCE DINNER

28th August 2009

Improvement in etch processes for III-V applications  Dr Mark Dineen  OIPT
 Improvements in ion beam processing inc SIMS EPD Dr Sebastien Pochon OIPT
 Growth of Nanowires and Nanotubes Chris Hodson  OIPT
Endpoint detection in plasma systems Andy Goodyear OIPT
Monitoring ALD by Spectroscopy ellipsometry, optical emission spectroscopy and mass spectrometry Erik Langereis TU Eindhoven
Integrated plasma processing simulation framework, linking tool scale plasma models with 2D feature scale etch simulator Maik Hauguth Uni Ilmenau
Plasma control/Diagnostics Andy Goodyear OIPT

To register for any of these seminars click here

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