The Kavli Nanoscience Institute, California Institute of Technology held a highly successful seminar and workshop in July 2008 at the Caltech, California facility with Oxford Instruments. The wide and varied programme proved to be a huge success, and participant numbers exceeded all expectations.
The two day event started with Presentations, Panel Discussions and a Networking Lunch on day one. Key guest speakers included Dr. Ivo Rangelow, Technical University Ilmenau, Plasma Simulation Program who spoke on ‘Plasma Processing Simulation Platform’, Dr. Axel Scherer, Neches Professor of Electrical Engineering, Applied Physics and Physics, Co-Director, Kavli Nanoscience Institute, Caltech whose topic was ‘Dry Etching of Highly Anisotropic Optical Structures’, Dr. Deirdre Olynick, Staff Scientist, Nanofabrication Facility, Lawrence Berkeley National Lab, whose talk covered ‘Nanoscale Pattern Transfer for Nanoscience’, and Dr. Michael Roukes, Professor of Physics, Applied Physics, and Bioengineering; Co-Director, Kavli Nanoscience Institute, Caltech, discussed the Advances in Nanoelectromechanical Systems.
Speakers Dr. Oskar Painter, Assistant Professor of Applied Physics, Caltech, Robert Gunn, Application Team Leader, Oxford Instruments Plasma Technology,
Scott Sitzman, Application Scientist, Oxford Instruments NanoAnalysis, and Dr Alex Buxbaum of FEI gave an insight into other key aspects of Plasma Etch.
The workshops in Caltech’s laboratories on Day Two were split into four groups:
1. DRIE etching of silicon microstructures for MEMS applications – Plasmalab100 ICP 380 for MEMS
2. Cryo-etch of silicon for optical waveguides and mirrors - Plasmalab100 ICP 380 – with wide range temp electrode (-150C to 450C)
3. Low-T CVD nitride and oxide growth – Plasmalab100 PECVD
4. Anisotropic GaAs etching with halogen (Chlorine) gas chemistries – Plasmalab100 ICP380
With well over 60 people attending this was a very high level event, which could not have been so successful without the hosts and invited speakers. Oxford Instruments will be planning another such event in California in July 2009, and also is running a similar seminar at Southampton University, UK in July 2009. For information on these and other future workshops please click here