Process News - October 2009

This regular newsletter from Oxford Instruments Plasma Technology (OIPT) includes articles on some of the exciting work the company is doing in process and tool innovation. We pride ourselves on the leading edge processes that we develop and continually refine at OIPT, but without the innovative research and demanding production requirements of our customers, these processes wouldn’t be developed and we wouldn’t be constantly challenged to improve them.

Enjoy your read!

 

Carbon Nanotubes and Semiconductor Nanowires for Microelectronics

Francesca Iacopi, Senior Scientist with the Nano group at IMEC, Belgium, recently gave a talk at OIPT's Seminar at Southampton University.

Here Dr Iacopi gives a summary of her talk and findings, using the PlasmalabSystem100 tool.

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Selecting the Best Etch Chemistry and Etch mask for Achieving Silicon Nanoscale Structures

M. David Henry and colleagues at the Applied Physics Laboratory, California Institute of Technology have written an article, from a talk given at the LBNL Seminar in July.  

Achieving nanoscale features requires a plasma etch utilising passivation and a good etch mask determined by the etch chemistry selected.  

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Conformal Coating of Carbon Nanotubes

Author: Dr Cigang Xu, Development Scientist at OIPT

There is great interest in the growth, functionalisation and application of carbon nanotubes.

Growth and coating can be combinedin a single tool. Here we show that the growth and functionalisation of carbon nanotubes can be performed in a vacuum environment using OIPT's Nanofab800Agile and Flexal tools.  

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CCD1 Spectrometer for Plasmalab Systems

Author: Andy Goodyear, Principal Applications Specialist, OIPT

A CCD Spectrometer is an extremeley useful additionto any plasma tool, since it can provide not only a process endpointing capability, but also a large amount of plasma spectroscopy information - used for monitoring the species within plasma.

 

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What are the Panels For?

Dr Mike Cooke, Chief Technology Officer at OIPT examines why panels need to enclose a machine.

Apart from style, he says there are important reasons to care about the panels, many of them affecting machine safety.

 

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Other Product and Process News... 

New Flexal features

Listening to customer feedback from current Flexal customers and following our own development roadmap, a number of enhancements and new features are available for Flexal. 

Strengthening OIPT's Etch Capability for the HBLED Market 

Mark Dineen, Principal Applications Engineer at OIPT explains how the team at OIPT has built on our established reputation to develop an evolution of the System133 RIE-ICP tool. 

Photovoltaics: Sputtered TCO Process Development

Oxford Instruments has introduced a single wafer sputtering system in addition to the PlasmalabSystem400 batch sputterer. 


 

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