System Support Features

Oxford Instruments PC2000™  Software is renowned for its clarity and ease of use, making it quick to train process operators while retaining full functionality for fab managers and service staff.

• The front end visual interface which controls and monitors the process tool is configured exactly for the customer’s system
• Ability to control a tool cluster from a single interface and PC
• Process recipes are written, stored and recalled through the same software, building a library
• Password controlled user login allows different levels of user access and tasks, from ‘onebutton’ run operation to full system functions
• Continuous system data logging ensures traceability of each wafer and process run
• Fully GEM/SECS compatible

We work with our customers to create the right system, process, and support package to meet your specific requirements, so our range of Service Level Agreements (SLA) will be tailored to your needs.

This can include:

• Guaranteed response times for support engineer visits and technical hotline calls
• Choice of support coverage up to 24/7
• Scheduled preventative maintenance calls
• Managed spares inventory options, including customer dedicated stock, via our parts locations worldwide
• Preferential spare part pricing
• Process training
• Certified maintenance training courses for customer’s own engineers in preventative maintenance and first level troubleshooting