Production Tools

Our advanced and versatile production tools are built on 200mm, 300mm single and multiwafer batch process modules and  tool platforms.

They offer excellent uniformity and high-throughput processes on a range of applications.

  • Atomic Layer Deposition

FlexAL

  • Physical Vapour Deposition

PlasmaPro System400

  • Nanoscale Growth

Nanofab700

Nanofab800Agile

  • Plasma Etch & Deposition

PlasmaPro 800Plus

PlasmaPro NGP1000

PlasmaPro System100

PlasmaPro System133

  • Ion Beam Etch & Deposition

Ionfab300Plus

Ionfab500Plus

Optofab3000

  • Failure Analysis

PlasmaPro NGP FA200

PlasmaPro FA300

PlasmaPro NGP FA200 ICP
  • Images 
  • Software 
  • Wafer Handling 
  • Support 
  • CoO 

 

Ion Beam on square handler

System100 with hex handler

  

System133 with hex handler

 Ionfab clustered with System133

PlasmaPro System100 with Hex handler

 PlasmaPro System133 with Hex handler

Our software is clear, easy to use, quick to learn and configured exactly for the customer's system. Its visual interface controls and monitors the process tool, and offers the ability to control a tool cluster from a single interface and PC.

Process 'recipes' are written, stored and recalled through the same software, building into a process library. In cassette-to-cassette and cluster systems, the users can associate individual recipes with each wafer to be processed, and run a complete set of process steps, loops and repeats. Password-controlled user login allows different levels of user access and tasks, from 'one-button' run operation to full system functions. Continuous process data logging ensures traceability of each wafer and process SECS/GEM compatible.

Oxford Instruments' process tools provide single wafer and batch capabilites, ranging from 50mm to 300mm wafer sizes. Specific wafer handling information can be found on individual product pages.

 - A Global Reach

 

We are committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

 

 Service Centres*   Parts Centres

Europe & Middle East

Montevrain, France
Wiesbaden, Germany
Haifa, Israel
St Petersburg, Russia
Moscow, Russia
Bristol, UK

USA

Arizona, USA
Texas, USA
San Francisco, CA, USA
Concord, MA, USA

Asia

Beijing, China
Guangzhou, China
Shanghai, China
Hong Kong
New Delhi, India
Mumbai, India
Calcutta, India
Bangalore, India
Tokyo, Japan
Kyungki-do, Korea
Penang, Malaysia
Singapore
Taiwan County, Taiwan

Asia

Shanghai, China
Taiwan County, Taiwan

EMEA

Bristol, UK

USA

Concord, MA, USA

*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages

High performance and excellent uniformity processes mean increased productivity and tool utilisation. Together with excellent reliability, these create low cost of ownership for Oxford Instruments' process tools. Supported by Oxford Instruments' preventative maintenance and service contract packages, the ultimate in system uptime can be assured.

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