Systems for Research and Development (R&D)

Oxford Instruments' software is clear, easy to use, quick to learn and configured exactly for the customer's system. Its visual interface controls and monitors the process tool, and offers the ability to control a tool cluster from a single interface and PC. Process 'recipes' are written, stored and recalled through the same software, building into a process library. In cassette-to-cassette and cluster systems, the users can associate individual recipes with each wafer to be processed, and run a complete set of process steps, loops and repeats. Password-controlled user login allows different levels of user access and tasks, from 'one-button' run operation to full system functions. Continuous process data logging ensures traceability of each wafer and process GEM/SECS compatible.

 

Service Centres*		Parts Centres
Europe & Middle East Montevrain, France Wiesbaden, Germany Haifa, Israel St Petersburg, Russia Moscow, Russia Bristol, UK USA Arizona, USA Texas, USA San Francisco, CA, USA Concord, MA, USA	Asia Beijing, China Guangzhou, China Shanghai, China Hong Kong New Delhi, India Mumbai, India Calcutta, India Bangalore, India Tokyo, Japan Kyungki-do, Korea Penang, Malaysia Singapore Taiwan County, Taiwan	Asia Shanghai, China Taiwan County, Taiwan EMEA Bristol, UK USA Concord, MA, USA
*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages

High performance and excellent uniformity processes mean increased productivity and tool utilisation. Together with excellent reliability, these create low cost of ownership for Oxford Instruments' process tools. Supported by Oxford Instruments' preventative maintenance and service contract packages, the ultimate in system uptime can be assured.