Tool for Nanoscale Growth - Nanofab700

The Nanofab™700 Nanoscale Growth System delivers high performance growth of nanotubes and nanowires with in-situ catalyst activation and rigorous process control.

Nanofab - Nanoscale Growth Systems

Variable sample sizes up to maximum 200mm wafers
PECVD film capability
Metal organic (MOCVD) precursor delivery for compound semiconductor nanowires
Aligned growth and control of film stress
Excellent temperature uniformity, and flexible agility control
Ability to process in high pressure and high flow regimes
Optional liquid source delivery system
Vacuum load lock to provide seperate sample preperation and process operation

Process tool features
Process Benefits
Support

Nanofab700 process tool features

Controllable growth of nanotubes and nanowires with flexible temperature up to up to 700 °C
Liquid precursor option
Plasma pre-treatment of the catalyst and chamber cleaning capability
PECVD - standard and high temperature deposition
Load lock
Compatible with a wide range of process gases, including oxygen

Process Benefits of the Nanofab700

Controllable growth of nanotubes and nanowires
Plasma pre-treatment of the catalyst for enhanced growth
Annealing capabilities up to 700 °C
Broad range of PECVD film deposition with excellent uniformity, high deposition rates and control of film properties such as refractive index, stress, electrical characteristics and wet chemcial etch rates

Nanostructured Materials	C, Si, Ge, ZnO, Ga2O3, GaN, GaAs, GaP, InP, InN
PECVD Films	SiO2, SiNx, a-Si, SiON, poly-Si, SiC

- A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Service Centres*

Parts Centres

Europe & Middle East

Montevrain, France
Wiesbaden, Germany
Haifa, Israel
St Petersburg, Russia
Moscow, Russia
Bristol, UK

USA

Arizona, USA
Texas, USA
San Francisco, CA, USA
Concord, MA, USA

Asia

Beijing, China
Guangzhou, China
Shanghai, China
Hong Kong
New Delhi, India
Mumbai, India
Calcutta, India
Bangalore, India
Tokyo, Japan
Kyungki-do, Korea
Penang, Malaysia
Singapore
Taiwan County, Taiwan

Asia

Shanghai, China
Taiwan County, Taiwan

EMEA

Bristol, UK

USA

Concord, MA, USA

*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages