TEOS - Delivery Module - Tetraethyl Orthosilicate Delivery Module

TEOS Delivery Module

Delivery module enabling TEOS based PECVD in PlasmaPro System100 and PlasmaPro System133 process tools

Excellent uniformity and conformality of deposition
Integrated purpose-designed solution
Optimised heated delivery lines
Easy source access and changeover
Flexible mounting options
Available as upgrade to existing PlasmaPro System100 and PlasmaPro System133 PECVD tools
Heated TEOS module offers easy access, together with safe change-over using the optional clip-on glovebox
The module can be connected into cleanroom extraction systems for complete health and safety assurance
Excellent control in SiO2 deposition

The complete TEOS PECVD system enables:

High quality, conformal deposition of SiO2 for photonics, dielectric layers and other structures
Control of film stress by pulsed high/low frequency power mixing
Control of deposition directionality and hence degree of step coverage by controlling oxygen radicals

Images
TEOS delivery module
Hardware & Gas Delivery
Support

PlasmaPro System133 TEOS PECVD - Click for larger image

TEOS PECVD glovebox - Click for larger image

PlasmaPro System133 TEOS PECVD open door - Click for larger image

TEOS PECVD open door - Click for larger image

TEOS Delivery Module

Fan-assisted oven
Housekeeping control valves
Pipe work prepared as standard for a Schumacher BK1200SSH container, which comes supplied with two manual valves: inlet valve (connected to dip tube) with 1/4 inch female VCR gland; outlet connected to vapour space with 1/2 inch male VCR nut. Other valve configurations available upon request.
Heated gas line to chamber
Optional glovebox and extraction for use during bubbler changeover

TEOS Process tool hardware

Heater-chiller for top electrode and gas inlet assembly heating
Chamber wall heating kit

Gas Delivery

Argon gas line and mass flow controller (MFC) on split manifold
Oxygen gas line on main manifold

- A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Service Centres*

Parts Centres

Europe & Middle East

Montevrain, France
Wiesbaden, Germany
Haifa, Israel
St Petersburg, Russia
Moscow, Russia
Bristol, UK

USA

Arizona, USA
Texas, USA
San Francisco, CA, USA
Concord, MA, USA

Asia

Beijing, China
Guangzhou, China
Shanghai, China
Hong Kong
New Delhi, India
Mumbai, India
Calcutta, India
Bangalore, India
Tokyo, Japan
Kyungki-do, Korea
Penang, Malaysia
Singapore
Taiwan County, Taiwan

Asia

Shanghai, China
Taiwan County, Taiwan

EMEA

Bristol, UK

USA

Concord, MA, USA

*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages