MicroanalysisOxford Instruments provides leading-edge systems that enable the mapping of material and electrical properties at the nanometre scale on electron microscopes (SEM and TEM) and ion-beam systems (FIB).

Our tools are used for R&D across a wide range of academic and industrial applications including semiconductors, biological, mining, metallurgy, and forensics.

Systems for elemental and/or phase composition

  • EDS (Energy Dispersive Spectroscopy) systems for SEM & FIB analyse at the micro- and nano-scale
  • WDS (Wavelength Dispersive Systems) systems for SEM/FIB enables greater X-ray resolution and precision
  • EDS systems for TEM characterise samples down to the atomic level

Systems for microstructural analysis

  • EBSD (Electron BackScatter Diffraction) systems characterises grain structure in the SEM/FIB
  • Ultra-high resolution EBSD, also known as Transmission Kikuchi Diffraction (TKD) for analysis at the nanoscale
  • Linescan, 2D mapping and 3D analyses

Systems for electrical characterisation

  • Electrical nanoprobing with EBIC (Electron Beam Induced Current) and EBAC (Electron Beam Absorbed Current) analysis methods provide electrical characterisation in the SEM & FIB

Microanalysis tutorials

EBSD Explained

EBSD Explained is a 24 page booklet packed with explanations of the science that underpins Electron BackScatter Diffraction (EBSD) - and practical hints for users at any level.

PDF 9.98MB
Silicon Drift Detectors Explained

SDD Explained is a 28 page tutorial giving insights into how an SDD works and is applied to Energy Dispersive Spectroscopy.

PDF 1.91MB
EDS for TEM Explained

EDS for TEM Explained is a 12 page tutorial that shows how Energy Dispersive Spectroscopy systems work in Transmission Electron Microscope applications.

PDF 4.04MB