Oxford Instruments provides leading-edge systems that enable the mapping of material and electrical properties at the nanometre scale on electron microscopes (SEM and TEM) and ion-beam systems (FIB).
Our tools are used for R&D across a wide range of academic and industrial applications including semiconductors, biological, mining, metallurgy, and forensics.
Systems for elemental and/or phase composition
EDS (Energy Dispersive Spectroscopy) systems for SEM & FIB analyse at the micro- and nano-scale
WDS (Wavelength Dispersive Systems) systems for SEM/FIB enables greater X-ray resolution and precision
EDS systems for TEM characterise samples down to the atomic level
Systems for microstructural analysis
EBSD (Electron BackScatter Diffraction) systems characterises grain structure in the SEM/FIB
Ultra-high resolution EBSD, also known as Transmission Kikuchi Diffraction (TKD) for analysis at the nanoscale
Linescan, 2D mapping and 3D analyses
Systems for electrical characterisation
Electrical nanoprobing with EBIC (Electron Beam Induced Current) and EBAC (Electron Beam Absorbed Current) analysis methods provide electrical characterisation in the SEM & FIB
EBSD Explained is a 24 page booklet packed with explanations of the science that underpins Electron BackScatter Diffraction (EBSD) - and practical hints for users at any level.
EDS for TEM Explained
EDS for TEM Explained is a 12 page tutorial that shows how Energy Dispersive Spectroscopy systems work in Transmission Electron Microscope applications.