Energy Dispersive Microanalysis (EDS/EDX), Wavelength Dispersive Microanalysis (WDS) and Electron Backscatter Diffraction (EBSD) for electron and ion-beam microscopes.
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EDS systems characterise elemental and/or chemical composition
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WDS does so with greater resolution and precision
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EBSD delivers microstructural characterisation in the SEM/FIB
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Application-specific modules are also available that have been tuned to process-driven tasks such as Gunshot Residue Analysis and Mineral Liberation Analysis - or for extended analyses, such as multi-layer characterisation and thickness measurements