EBSD analysis

EBSD - Electron Backscatter Diffraction -  analysis is a very powerful tool for microstructural characterisation. It identifies:

  • Crystal orientation
  • Grain size
  • Global and local texture
  • Recrystallise/deformed fractions
  • Substructure analysis
  • Strain analysis
  • Grain boundary characterisation
  • CSL boundary distribution
  • Slip system activity
  • Phase identification, distribution and transformations
  • Fracture analysis...

AZtec combines the speed and sensitivity of Nordlys EBSD detectors with the superior analytical performance of AZtecHKL software to create a powerful and versatile tool for Electron Backscatter Diffraction (EBSD) and Transmission Kikuchi Diffraction (TKD) analysis.

The image above is a TKD IPF map of strained Cu. Step size is a just 4 nm. Courtesy: Saritha Samudrala and Kevin Hemker.

EBSD Tutorial

EBSD Explained

EBSD Explained is a 24 page tutorial that not only gives newcomers a solid foundation in the underlining science of the subject, but also shows how the theory is applied in practice to get reliable and accurate EBSD results. 

If you run courses on EBSD analysis please contact your local sales team for free copies of the booklet.

PDF 9.98MB

EBSD Application Notes (2015)

TKD Analysis in AZtec

The TKD technique has been proven to enable spatial resolutions better than 10 nm.  This technique is ideal for routine EBSD characterisation of both nanostructured and highly deformed samples.

This application note describes some of the challenges when using TKD and how application of the AZtec EBSD system overcomes them.

PDF 1.91MB
Strain analysis with AZtec EBSD

Strain in a material’s microstructure has a significant influence on its properties and behaviour. Therefore, characterising microstructural strain is now of increasing interest in engineering materials. The Oxford Instruments’ AZtec EBSD system is ideal for measuring strain on the micro- and nano- scale as it includes extensive functionality to examine and understand the state of strain in materials.

This technical note covers aspects of strain analysis by AZtec: from the importance of the quality of the initial Kikuchi pattern collection, to the application of a wide-ranging, comprehensive set of postacquisition data analysis tools specifically designed to study strain, including third party analysis and strain visualisation tools, such as BLG Crosscourt.

PDF 10.29MB
TruPhase: Solving phases with similar crystal structures but different chemistry

EBSD identifies crystalline phases on the basis of their particular crystallographic characteristics and allows the orientation of the mineral grains within a sample to be determined. However, it has traditionally been a challenge to differentiate between phases with very similar crystal structures.

AZtec TruPhase enables phases with very similar crystal structures to be differentiated by simultaneously collecting EBSD and Energy Dispersive X-ray Spectrometry (EDS) data.

PDF 5.17MB

Products In This Group

EBSD Software AZtecHKL

EBSD Software AZtecHKL

AZtecHKL EBSD software is is a very powerful tool for microstructural characterisation in the SEM or FIB.

EBSD Detector NordlysMax3

EBSD Detector NordlysMax3

NordlysMax3 is the World’s fastest EBSD detector. Collect, index and display data in real-time at 1580 points per second - even during simultaneous EDS acquisition!

EBSD Detector - NordlysNano

EBSD Detector - NordlysNano

Either Nordlys detector delivers world-leading EBSD performance over all application regimes. NordlysNano delivers the best sensitivity and achieves the highest spatial resolution.

EBSD Post-processing Software

EBSD Post-processing Software

EBSD Post-processing Software: orientation mapping, pole and inverse pole figures, ODF and MODF calculation and display, phase creation...



AZtecSynergy enables simultaneous EBSD & EDS acquisition and analysis in real-time.



Explore a 3rd dimension of EBSD with this powerful 3D EBSD solution. It combines EBSD software with the syncronised milling capabilities of a FIB-SEM.