Microanalysis solutions

We provide a suite of solutions that are targeted at specific microanalysis problems in industry and research. The solutions have been developed in partnership with leaders in these application areas, and so are tuned to the needs of the typical operator. Based on our standard microanalysis hardware and software platforms, they provide an easy upgrade path from an existing EDS or EBSD system.

Mineral Liberation
Thin Film Analysis
Steel
Gunshot Residue
Particle Analysis

Phase identification and phase area analysis in a sample containing galena and sphalerite.

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INCAMineral is a powerful, automated, Mineral Liberation Analysis solution. It enables ore characterisation, provides vital data on metal recovery and enables process yield characterisation using multipurpose SEMs.

Exploiting the performance of Oxford Instruments’ large area SDDs (such as the X-Max), it provides accurate classification of minerals at speeds comparible to dedicated systems - but with the flexibilty to perform other investigations as required.

Automated mineral characterisation

Reporting modal mineralogy
Liberation yieds
Mineral locking and association
Particle and grain size distribution

Applications

Precious metal recovery (PGM)
Base metal recovery
Iron ore characterisation
Coal (mineral impurity analysis)

Performance

High speed acquisition using SDD technology
Automated analysis over wide area, resolution at the nanoscale
Based on proven Oxford Instruments algorithms

Flexibility

Works with most SEMs
Can be retrofitted to existing systems
Grain relocation for more detailed analysis using WDS, EBSD and complementary EDS techniques
Upgrade paths include large area mapping, quantitative EDS mapping and more

Non-destructive composition and thickness measurements of surface and sub-surface layers.

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ThinFilmID software determines in-situ composition and thickness of thin film structures.

Using a highly focussed electron beam to analyse a sample means the analysis is spatially resolved laterally as well as with depth, therefore nano-scale thin film structures can be measured

The analysis of both the composition and thickness of the layers is non-destructive, with excellent lateral resolution.

The unique capabilities of ThinFilmID are:

Determine thickness of layers from 2nm
Determine composition of elements from less than 1wt%
Lateral resolution down to 200nm or less
Selects precise position of all measurements for complex structures
Non destructive analysis with minimal sample preparation, (no need for cleaving or cross-sectioning)
Rapid data collection and analysis
Compatible with all SEMs using AZtec or INCA

Steel Inclusions

Various types of non-metallic inclusions plotted on a ternary diagram and inset showing the X-ray map of a complex inclusion.

For Steel Inclusion detection and measurement, an SEM is used for the detection of non-metallic inclusions, and EDS for the characterisation of the chemistry.

Automated Inclusion Analysis
INCAFeature automates this process: it enables the analysis of large sample areas in microscopic detail.

Benefits:

Automated - no user intervention or bias
Reliable inclusion detection
Measurement of inclusions less than1µm in size
Accurate chemical analysis and classification
Non destructive
Relocate specific inclusions for further investigation

Inclusion Classifier is an additional data processing tool. It is launched from within INCA Feature and uses the INCA Feature database. It provides inclusion classification to the published standards with options to tabulate results and plot a range of user defined ternary diagrams.

High resolution inclusion analysis in AZtec

AZtec TruMap enables the accurate mapping of complex steel inclusions - in real-time:

Analysis at low KV for nanoscale resolution
Elimination of background artefacts
Peak overlap correction

AZtec TruMap analysis of stell inclusions

AZtec analysis using TruMap of steel inclusion measured at 5kV, one of the inclusions is only 100 nm in diameter .

In forensic science, INCAGSR has become the standard to use.

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INCA

Reliable hardware that comes with a guaranteed performance <1eV shift in peak position and resolution between count rates of 1Kcps and 10Kcps.
Reliable detector that comes with guaranteed performance - resolution guaranteed on the microscope.
Unlike other systems, which can only detect and classify particles based on a fixed element list, INCAEnergy uses AutoID to ensure that unexpected particles are automatically detected and analysed correctly.
Stage calibration and validation is an integral part of the software, and ensures samples are comprehensively analysed without the fear of missed or double-counted particles.
Ability to relocate to particles of interest, for manual confirmation. This newly acquired data may be saved in the data set referenced to the original particle.

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INCAFeature is a particle analysis system for the electron microscope designed to rapidly find and analyse large numbers of particles.

Benefits

Easy, navigator based set-up
Database structure designed to deal with large amounts of high quality and high precision data
Results are highly reproducible – used for forensic examination of evidence admissible in courts of law.
Automatically generate detailed reports containing all important measurement and setup parameter.
Autonomous data acquisition and analysis overnight or over weekends to maximise usage of expensive SEM time.
Extract a large number of parameters automatically like:

o Number of particles
o Morphological parameter like area, length and width
o Orientation
o Size distributions
o Chemical composition

INCAFeature is a proven solution for a variety of applications, including:

Technical cleanliness to ISO 16232 / VDA 19 standards (see application note)
Metal particle contamination in Li-ion battery manufacture (see application note)
Wear analysis (particle analysis of engine oil)
QC of cleanroom processes in the semiconductor industry