Oxford Instruments strives to offer process improvements to customer systems, with benefits of greater productivity, cost reduction or scientific advancements. As a result of our policy of continuous product development, we offer a range of system upgrades that both extend the life of customer systems and add new functionality – for example from one type of process to another. Contracted customers would be able to purchase such upgrades at a discounted list price.

For further details or a quote on any of the above services, please contact us via your local Oxford Instruments sales and customer support office, or email us at: plasmacs@oxinst.com

CCD1 Spectrometer

CCD1 Spectrometer

A CCD spectrometer is an extremely useful addition to any plasma tool

Control System

Control System

We offer a growing range of control system upgrades, and all are easy to install and set up

Dry Pump N2 Standby Mode

Dry Pump N2 Standby Mode

The Dry Pump N2 Standby mode saves energy and nitrogen used by its plasma etch, deposition and growth systems.

Gas Pod

Gas Pod

Our Gas Pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility.

LN2 Autochangeover

LN2 Autochangeover

An upgrade to our Cryo Tables, the unit may be added as an upgrade to many of our systems

Maglev Turbo Upgrade

Maglev Turbo Upgrade

Offering superior pumping speeds and higher throughput

X20 Control Systems Upgrade

X20 Control Systems Upgrade

Compact system offering excellent scan speeds and processing

Optical End Point Detectors

Optical End Point Detectors

Optical End Point Detection Upgrades for Etch & Deposition tools

Further Information

Contact Us

  • Sales Team

    +1 978 369 9933

  • Support Team

    +1 978 369 9933

  • Plasma Technology

    Online Enquiry