Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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Global Customer Support & Service

Global Customer Support & Service - Oxford Instruments Plasma Technology

Oxford Instruments is committed to supporting our customers around the world, with a range of support agreements, service options and training to meet your needs. More >>

Molecular beam epitaxy (MBE)

V90 molecular beam epitaxy (MBE) system detail

Molecular beam epitaxy (MBE)

Proven systems for molecular beam epitaxy (MBE)

Our systems and products for molecular beam epitaxy offer the world-respected MBE technology of VG Semicon with the continued development and worldwide support of Oxford Instruments, proven on advanced device growth such as quantum cascade lasers (QCLs) and blue/violet laser diodes.

MBE products

Select one of our MBE reactor systems or sources from the Product Finder or Related Products sections on the right to learn more:

MBE reactors

V80H

  • MBE for research with production-proven technology

V90

  • MBE for research, device development and small-scale production

V100

  • Fully qualified production MBE

MBE sources

ThermaCelleffusion sources

  • Unrivalled stability and composition control for III-V, II-VI and nitride MBE assured by industry-leading soft-action shutter design and ThermaCell source technology

ECell™As Arsenic cracker source

  • The ECellAs valved As effusion source or "cracker cell", designed for high performance MBE growth of Arsenic-containing III-V materials, offers significant benefits over the thermal control of conventional open sources

V90 molecular beam epitaxy (MBE) system

V90 molecular beam epitaxy (MBE) system

Product finder

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NEW - MBE software upgrade for V80H, V90 & V100

MBE software upgrade for V80H, V90 & V100


Discover enhanced software and hardware functionality for V80H, V90 & V100 MBE systems Click here or in Downloads and Links below

Process News

Process News


Read about what's new in etching, deposition and growth More >>

Related Information

Downloads and Links

    Related Products