US Air Force Research Laboratory invests in Oxford Instruments MBE processing technology

Oxford Instruments, world leaders in the supply of MBE, plasma and ion beam processing equipment, are pleased to announce the order of a V90 MBE system by the United States Air Force Research Laboratory (AFRL). The system will be installed at the AFRL's Directed Energy Directorate in Albuquerque, New Mexico and used by Dr Ron Kaspi and his Mid-IR Laser Group to conduct basic research in semiconductors as well as to develop novel opto-electronic devices.

With the USAF already a valued customer, this order re-affirms Oxford Instruments’ leading status in MBE processing technology since its acquisition of VG Semicon in 2003.

Oxford Instruments’ V90 system was the first MBE system of its kind, configured for the growth of a range of III-V compound semiconducting materials such as arsenides, antimonides and nitrides. Designed and developed specifically for MBE research, device development and small-scale 4 inch, 3 inch or multiple 2 inch epi-wafer production, it allows up to 12 platens of wafers to be uploaded at any one time.

Dr Kaspi and his group are responsible for developing advanced semiconductor materials and manufacturing technologies. “We are interested in improving the electrical and optical properties of antimony-containing III-V semiconductor heterostructures, and to develop opto-electronic devices operating in the mid- and long-infrared wavelengths. We hope to achieve this through a better understanding of the MBE-growth processes, improved control over interface formation, and fundamental studies of active layers“, said Dr Kaspi . “Among other things, we were particularly interested in a system that offered a robust bellow-free shutter design, as well as good past performance”.

Mr Jim Williams, Oxford Instruments’ Sales Director comments, “Our high performance V90 MBE system has demonstrated reproducible growth of the highest quality materials in terms of both electrical and optical properties. Critical to the system is its unique configuration providing significant flexibility to the user, with a wide range of material-equipment options and therefore compositional control of the epi-wafer. The MBE system design, incorporating our proprietary ThermaCell™ technology and the very latest in shutter technology, provides unrivalled stability, offering high throughput and device yield. This order is an example of our world-renowned reputation, technical expertise and commitment to meeting and exceeding customers’ needs.” Oxford Instruments’ V90 MBE system was chosen out of competing systems primarily due to its optimal size for optoelectronics research as well as small-scale production.