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Product details

The V90 is the MBE platform designed and focused to meet the needs of the semiconductor device development engineer and also to satisfy small to medium scale epi-wafer production.

The V90 incorporates many of the most advanced designs in MBE technology:

• The ThermaCell^TM is the most stable and reproducible evaporation source available
  
• The latest generation of arc-motion, soft action shutters provide the lowest defect generation and source fallback capabilities in the technology
  
• The manipulator can be fitted with the latest back-surface optical monitoring of the wafer temperature

The V90 is based on a thorough understanding of key parameters required to scale up from a research to production MBE system while maintaining the same high level of material quality:

• The V90 is designed for simultaneous growth onto 3 x 2” or single (4”, 3”, or 2”) substrates.  Wafer transport can be fully automated and is integrated to the growth software.  Sample transfer has been designed to minimize the number of hand-offs for rapid load/unload times and maximum reliability
  
• The deposition chamber incorporates all the necessary components for the controlled growth and doping of semiconductor materials, a complete range of effusion cells are available.  A monitoring ionisation gauge, RHEED system and residual gas analyser are used for growth and environment monitoring
  
• The preparation chamber can be installed with outgassing and parking/storage facilities
  
• The fast entry chamber/lock (FEL) is low-volume and integral with the preparation chamber. It allows a cassette of six sample holders to be loaded into the system at one time.  A cassette outgassing facility may be fitted in the entry lock
  
• X-GEN3000^TM process software runs under Windows XP^TM with full password protection, allowing the System Manager to control the operations permitted to each user. The software enables automated flux calibration, display of chamber pressures and data logging

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