Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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INCAx-act - Analytical Silicon Drift Detector (SDD) with PentaFET® Precision

Analytical Silicon Drift Detector (SDD) : INCAx-act (Click to enlarge)


Now available with 129eV Manganese specification

INCAx-act LN2-free Analytical Silicon Drift Detector with PentaFET® Precision has six advantages:

  • The Speed of a Silicon Drift Detector
  • The Accuracy of the INCA Quant software
  • The Reliability of an INCAx-stream pulse processor
  • The Convenience of an LN2-free System
  • The Quality of Oxford Instruments Technology
  • The Precision of Oxford Instruments PentaFET Technology

These combine to give you:

  • Guaranteed carbon resolution in accordance with ISO 15632:2002!
  • Stable, accurate results 10 times faster than conventional SDDs
  • Accurate quantitative & qualitative analysis you can trust
  • Superior light element detection at all count rates
  • Fast, simple & effective mapping without pile-up problems
  • Consistent signal output with increasing count rates

INCAx-act with PentaFET Precision uses a unique silicon drift sensor which, combined with the external FET and Oxford Instruments digital pulse processor, results in a system with the stability to provide accurate results under all conditions.

The INCAx-act Analytical SDD Promise -
Quality Results Without Compromise



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