Asylum Research offers a full suite of tools for characterizing electrical properties at the nanoscale on the MFP-3D™
families of AFMs. While quantitative electrical measurement in itself is the goal, electrical modes are also often used to quickly detect, distinguish, and identify components based on qualitative differences in electric properties relative to other materials in the sample.
AFM Nanoelectrical Measurement Modes
Kelvin Probe Force Microscopy (KPFM) - accurately measures surface potential based on differences in work function, presence of trapped charges, or voltage offsets.
Electric Force Microscopy (EFM) - maps force gradients generated by electrostatic charges
Conductive AFM (CAFM) - measures current through the tip as a function of an applied sample bias
Current Mapping with Fast Force Mapping - measures current at an applied sample bias during the contact segment of a fast force curve
Scanning Microwave Impedance Microscopy (sMIM) - maps variations in local capacitance and resistance, as well as dC/dV and dR/dV
Nanoscale Time Dependent Dielectric Breakdown (nanoTDDB) - detects breakdown voltage of dielectric thin films
Detect conductive inclusions in polymer blends
Monitor the uniformity of thin film coverage and thickness
Probe metallic nanostructures based on their work function
Characterize potential profiles of semiconductor junctions and heterostructures
Identify regions of a sample containing trapped charge
Detect carbon nanotubes buried in insulating matrix
Characterize the switching performance of access devices in non-volatile memory
Characterize a wide range of linear and non-linear materials, including conductors, semiconductors, and insulators
Provide contrast based on material permittivity and conductivity
Map dopant concentrations and dopant types, with applications in failure analysis of microelectronic devices
Qualify carbon nanotubes exhibiting metallic vs. semimetallic behavior
Visualize buried structures based on capactance variations measured at the surface
Application Notes: Probing Electrical Properties
An in-depth look at tools and techniques to evaluate local electrical properties.
Detailed discussion of conductive AFM (CAFM) using Asylum’s exclusive ORCA modules.
Detailed discussion of piezoresponse force microscopy (PFM) techniques, many exclusive to Asylum AFMs.
Scanning Microwave Impedance Microscopy (sMIM) measures conductivity and permittivity at high resolution.
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