Joint Zeiss & Oxford Instruments webinar

This webinar recording, a joint presentation by ZEISS and Oxford Instruments, is a must for materials scientists and engineers needing to image and characterize regions less than 50 nm size in the scanning electron microscope.

ZEISS GeminiSEM 500, a new field emission SEM (FE-SEM) for sub-nanometer, low voltage images from any sample, offers exciting new capabilities for investigating smaller nano-structures, interfaces and surfaces. The Inlens EsB detector provides high resolution compositional contrast at typical 1-3 keV accelerating voltage. However, no traditional EDS detector could support elemental characterization at such low accelerating voltages. The new X-Max Extreme from Oxford Instruments changes this. With X-Max Extreme, both SEM imaging and EDS performance can be performed simultaneously and the EDS resolution approaches that of the SEM.

After the webinar you will understand:

  • How low voltage and short working distances provide a SEM based / bulk sample solution to nano-characterization
  • How the challenges of working at sub 3 kV accelerating voltage can now be overcome
  • How to correlate the compositional contrast obtained in a ZEISS FE-SEM with EDS results for the characterization of nano-structures and surfaces

The seamless integration of the X-Max Extreme detector from Oxford Instruments and ZEISS Gemini SEM 500 provides the breakthrough in fast and comprehensive imaging and material analysis at the nano-scale.



Supporting documents

X-Max Extreme brochure

X-Max Extreme is a windowless 100mm2 version of X-Max designed to maximise sensitivity and spatial resolution. It uses a radical geometry to optimise both imaging and EDS performance in ultra-high resolution FEG-SEMs. This 4 page brochure shows some of the applications.

PDF 6.05MB
Sub 10nm EDS analysis in the SEM

Using new detector technology and current ultra-high resolution FEG-SEM capability, the practical limitations for high spatial resolution EDS analysis in the SEM have been investigated. The results are shown in this application paper.

PDF 4.22MB
Improving EBSD spatial resolution

This application note illustrates the application of TKD to a nanostructured nickel sample and a highly deformed stainless steel, both of which were impossible to characterise using conventional EBSD.

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