t-EBSD Analysist-EBSD, the collection of EBSD data in
transmission mode in the SEM - also referred to as TKD, is increasingly applied for materials characterisation at the


Despite significant technological developments in recent years, the conventional EBSD technique is still limited by the pattern source volume to resolutions in the order of 25-100 nm. This is insufficient to measure accurately truly nanostructured materials (with mean grain sizes below 100 nm).

A new approach to SEM-based diffraction has emerged. This uses an electron transparent sample coupled with conventional EBSD hardware and software. This technique, referred to as transmission EBSD (t-EBSD: Keller and Geiss, 2012) or SEM Transmission Kikuchi Diffraction (TKD: Trimby, 2012) has been proven to enable spatial resolutions better than 10nm. 

t-EBSD advantages

  • Spatial resolution better than 10 nm
  • Ideal for the routine characterisation of nanostructured material
  • EBSD analysis of highly deformed samples

Download the AZtecHKL brochure below. It describes working with an EBSD system in transmission mode, using a NordlysNano EBSD detector and AZtecHKL. It illustrates the application of TKD to samples which were impossible to characterise using conventional EBSD.


TKD Sample Holder

A new Transmission Kikuchi Diffraction sample holder is available from Oxford Instruments. It is designed to hold thin (TEM) samples at a geometry so transmitted kikuchi patterns can be collected on the screen of the EBSD detector. 

  • Can be used on a range of SEM types
  • Easy to use, and eases the locating and holding of delicate thin samples:
    • The fixing screws do not need to be removed when changing or loading samples
    • The screws are loosened and the top plate (which holds the sample in position) can be lifted and slid back out of the way
    • When the sample is located the top plate is replaced and the screws tightened
    • There is a recessed section in the lower plate so that the sample can be easily positioned
  • The entire top plate can be inverted, should the sample be mounted upside down
  • In addition, the plate can be mounted for conventional EBSD
  • The sample holder includes a beam stop to prevent the beam which passes through the thin sample being reflected back up onto the EBSD screen, and therefore interfering with the EBSP

TKD Holder