Checking the vacuum switch on your Oxford Instruments system

  • We recommend that the operation of the vacuum switch is checked periodically, at least once per year in all systems.
  • This bulletin provides advice to customers on checking the vacuum safety switch(es) on Oxford Instruments Plasma Technology process equipment. It is generally applicable across all product lines.
  • The bulletin is not issued because we have a raised level of concern: it is to draw attention to a recommended check to a safety device.

Full guidelines are available to download below.

Download the guidelines

Checking the vacuum switch

Service Announcement: Checking the vacuum switch on your Oxford Instruments system

PDF 789KB

Why not upgrade?

If your machine has one of the older Edwards vacuum switches similar to the one shown above, consider contacting us for an upgrade to an MKS switch with a lower trip point - especially if your tool uses hazardous gases.

Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
5:21 PM - 16 Feb 18
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