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The Advanced Energy LF5 generator is now obsolete.
Our standard PECVD LF generator is now the Comdel CLX600.

Benefits

  • EN / UL compliant.
  • The solid-state design provides low cost of ownership with high reliability
  • Air cooled instead of water cooled as per previous LF configuration
  • Maximum power of 500W makes it a direct drop in replacement

This bulletin applies to the following systems:

Plasmalab100, PlasmaPro100, 133, PlasmaPro 80, Plasmalab800

If you would like to upgrade to the Comdel CLX600 or would like more information please email PlasmaCS@oxinst.com

Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
5:21 PM - 16 Feb 18
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