The Advanced Energy LF5 generator is now obsolete.
Our standard PECVD LF generator is now the Comdel CLX600.
EN / UL compliant.
The solid-state design provides low cost of ownership with high reliability
Air cooled instead of water cooled as per previous LF configuration
Maximum power of 500W makes it a direct drop in replacement
This bulletin applies to the following systems:
Plasmalab100, PlasmaPro100, 133, PlasmaPro 80, Plasmalab800
If you would like to upgrade to the Comdel CLX600 or would like more information please email PlasmaCS@oxinst.com