The PlasmaPro 100 Polaris single wafer etch tool:
An evolution in single wafer etch technology
With extensive experience of etching all HBLED related materials, our technologies enable the cost of ownership and yield required to maximise the performance of your devices.
The PlasmaPro 100 Polaris single wafer etch system offers smart solutions to produce the etch results you need to maintain your competitive edge.
Designed specifically for the harsh chemistries required for HBLED materials, the PlasmaPro 100 Polaris delivers fast etch rates uniformly on wafers up to 200mm diameter. Above all it has been developed with reliability, uptime and ease of serviceability in mind.