And the winner of our SEM Competition 2015 is...

Victor Dolores-Calzadilla
Eindhoven University of Technology

For his SEM image titled:
Integrated nanoLED for photonic circuits

How it was created:

The metal-cavity nanoLED was fabricated in a III-V layer stack bonded to a silicon wafer for future compatibility with CMOS.

Three e-beam lithography steps were required to fabricate the nanocavity, waveguide and grating coupler, using HSQ and ZEP resists. After exposure and development, the pattern is transferred from the resist to a hardmask using an Oxford Instruments  Plasmalab System 100 (RIE) tool, and later the semiconductor etching was done with a Plasmalab System 100 (ICP 180). The hardmasks used (SiO2 and Si3N4 ) were deposited with a Plasmalab System 100 (PECVD).

Afterwards, metallization is done by lift-off with optical lithography in order to fabricate the metal cavity and the electrical contacts.

Congratulations to Victor and thank you to all who entered, please browse through the top entries below.

Top entries 2015

Naval Research Laboratory: Battle Droid in Star Wars

Naval Research Laboratory: Battle Droid in Star Wars

Naval Research Laboratory: Battle Droid in Star Wars

Naval Research Laboratory: Battle Droid in Star Wars

Naval Research Laboratory: Nano Photonic Crystal Flowers

Naval Research Laboratory: Nano Photonic Crystal Flowers

Naval Research Laboratory: Nano Photonic Crystal Flowers

Naval Research Laboratory: Nano Photonic Crystal Flowers

Naval Research Laboratory: Spade soldiers of Elice in Wonderland

Naval Research Laboratory: Spade soldiers of Elice in Wonderland

Naval Research Laboratory: Spade soldiers of Elice in Wonderland

Naval Research Laboratory: Spade soldiers of Elice in Wonderland

Naval Research Laboratory: Spade soldiers of Elice in Wonderland

Naval Research Laboratory: Spade soldiers of Elice in Wonderland

Indian Institute of Technology Kanpur: Methane hydrogen ICP RIE of InGaAsP

Indian Institute of Technology Kanpur: Methane hydrogen ICP RIE of InGaAsP

Vienna University of Technology: Nanowire Array

Vienna University of Technology: Nanowire Array

Novela: Silicon on grass

Novela: Silicon on grass

CNR-IMM: Octahedral Silicon nanocrystals

CNR-IMM: Octahedral Silicon nanocrystals

Novela: MEMS probes to save lives

Novela: MEMS probes to save lives

Aalto University: Bottom Sea Nanowires

Aalto University: Bottom Sea Nanowires

Eindhoven University of Technology: Integrated nanoLED for photonic circuits

Eindhoven University of Technology: Integrated nanoLED for photonic circuits

Institute of Physics: Si Nanocones

Institute of Physics: Si Nanocones

Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
5:21 PM - 16 Feb 18
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