Micro/Nano Electro Mechanical Systems (M/NEMS) and Sensors have become well established with multiple devices being used in consumer and commercial products for example: Smartphone, Automotive, Games consoles, Navigation Aids, Drones and Biomedical devices. This is set to increase as the Internet of Things (IoT) matures.

With the increased demands for energy efficient, smaller and cost effective devices, a comprehensive selection of fabrication requirements is essential. Oxford Instruments offers a unique range of flexible equipment and process solutions to meet these challenges, which include ICP, PECVD, ALD, nanoscale growth and ion beam etch and deposition.

ALD - FlexAL

ALD - FlexAL

DRIE Si etch – PlasmaPro 100 Estrelas

DRIE Si etch – PlasmaPro 100 Estrelas

ICP etch – PlasmaPro 100 Polaris

ICP etch – PlasmaPro 100 Polaris

Video: BioMEMS Process Solutions