MEMS Applications and Systems: Enabling the next generation of industrial and consumer products

Combining silicon-based microelectronics with micromachining technology, MEMS techniques and microsystem-based devices can potentially affect our lives and the way we live in a most positive way. Millions of MEMS devices are now embedded in products that we use daily.

Using techniques including deep silicon etch, cryo etch, Bosch and ALD, Oxford Instruments' versatile and high performance systems are designed to facilitate this MEMS revolution.