‘Nanoscale Plasma Processing 2012’ workshop at MTL, Cambridge, MA

MTL, Cambridge MA, USA
05 December 2012
Businesses Attending:
Plasma Technology

Oxford Instruments Plasma Technology & MIT’s Microsystems Technology Laboratories (MTL), Cambridge, MA are holding a joint seminar which will address the latest research and technologies in plasma etch deposition and growth. This 1 day event on 5th December, at the MIT campus in Cambridge, MA, will be comprised of presentations, discussions, and a networking lunch, focussing on latest innovations.

The Seminar will include speakers from key international research institutes, who will discuss their research: Prof. Erwin Kessels, Technical University Eindhoven; Vince Genova, Cornell University. In addition, experts in their field from Oxford Instruments & MTL will speak about recent process and applications developments in a number of plasma processing areas.

Presentations cover a full day and currently include:

  • ALD applications
  • An Overview of Plasma ALD process
  • MEMS process
  • Nanoscale dielectric etching

This seminar is free of charge, but must be booked in advance as places are limited. To book a place or receive further information, email: nancy.crouch@oxinst.com.

‘Nanoscale Plasma Processing 2012’ workshop announced at MTL, Cambridge, MA on 5th December 2012
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