MEMS and NEMS Processing Advances one day workshop

IEMN, Lille, France
08 April 2014
Businesses Attending:
Plasma Technology

MEMS and NEMS Processing Advances one day workshop presented by Oxford Instruments Plasma Technology and IEMN.

This workshop is open to all those people working in industry and academia, with an interest in recent progress in research and development, plus future trends in the fabrication and application of micro & nano structures and devices.

An interactive, one day technical seminar focused on practical applications, techniques and advances.
This technical workshop is being hosted in conjunction with the Institute of Electronics Micro-electronics and Nanotechnology (IEMN) in Lille. It is a one day event aimed at all those scientists working in research and manufacturing with an interest in MEMS and NEMS, and is designed to keep participants abreast of the latest technologies and trends in these hot industry research topics.
Talks will include topics such as:

  • ALD for MEMS - Harm Knoops, TU Eindhoven / Oxford Instruments

  • MEMS research applications and results - Steve Arscot, IEMN

  • Looking towards the next generation of MEMS devices - Dr.Eric Mounier Senior Analyst, MEMS Devices & Technologies, Yole Développement

  • A microwave induced remote afterglow reactor for the deposition of Organosilicon plasma polymers - Garrett Curley, IEMN, France

  • Supporting Oxford Instruments Systems - Diane Nichols, Oxford Instruments

  • Transformational Electronics: A Powerful Futuristic Paradigm On and For Oxford Instruments - Galo Torres Sevilla, Integrated Nanotechnology Lab, King Abdullah University of Science and Technology, Saudi Arabia

  • Etch and Deposition Plasma Processes for MEMS and TSV - Mark McNie, Oxford Instruments

  • MEMS & NEMS Micro-technological processes for sensors, energy harvesting and energy management - Professor Laurent Montes, Associate Prof, Grenoble INP

The workshop is free of charge however advance booking is essential. Register your place here.