'Nanoscale Processing for MEMS and NEMS'  Workshop 8th July 2014

IISc Bangalore, India
08 July 2014
Businesses Attending:
Plasma Technology

Join our 'Nanoscale Processing for MEMS and NEMS' workshop 8th July:
Pre-ISSS conference workshop at IISc Bangalore

This informative one day workshop, will be an introduction into the process development requirements of MEMS devices, and will also discuss future trends in MEMS and NEMS micro & nano structures and devices. Expert speakers from CeNSE, IISc Bangalore, IIT Kanpur & Oxford Instruments will discuss:

  • Microfluidics - an overview of various applications
    Prof Siddhartha Panda, IIT Kanpur
  • MEMS for Space Applications 
    Dr. M M Nayak, CeNSE, IISc
  • Fundamentals of Sputtering Techniques
    Dr. S Mohan, CeNSE, IISc
  • Introduction to MEMS processing
    Mark McNie, Oxford Instruments
  • Industry expert view on the MEMS industry
    Dr David Haynes, Oxford Instruments
  • Overviews of the many techniques for MEMS: PECVD, ALD, Etching
    Dr David Haynes, Michael Stokeley, & Mark McNie, Oxford Instruments

It is open to all those people working in industry and academia, with an interest in recent progress in research and development, plus future trends in the fabrication and application of MEMS and NEMS devices.

This workshop includes lunch & refreshments, & is free of charge to ISSS conference delegates but booking is essential. (A charge applies to non-conference delegates)