Oxford Instruments Plasma Technology has developed a number of processes for the production of Photovoltaics (solar cells) using our flexible and powerful tools and with key technologies.

Processes for Photovoltaics from Oxford Instruments:

Example photovoltaic applications include:

  • Passivation of interface defects
  • Anti reflective coating
  • Surface texturing
  • Heterojunctions
  • Transparent conductive oxide
  • Edge isolation etch
  • Si thin film

Products For This Application

EDS Software for SEM AZtecEnergy

EDS Software for SEM AZtecEnergy

AZtecEnergy EDS Microanalysis software characterises material composition of samples inside a SEM or FIB. From high speed acquisition, data analysis and reporting of single points, linescans and area mapping.

PlasmaPro 80 compact RIE tool

PlasmaPro 80 compact RIE tool

PlasmaPro 80 compact open loading RIE tool

PlasmaPro 100 RIE System

PlasmaPro 100 RIE System

Delivers anisotropic dry etching for an extensive range of processes

PlasmaPro 100 Cobra ICP Etch

PlasmaPro 100 Cobra ICP Etch

PlasmaPro 100 offers advanced plasma etch and deposition solutions on one platform with loadlock or cassette to cassette for RIE, ICP etch, ICP CVD and PECVD, upto 200mm single wafer platforms or multi-wafer batch capability.

PlasmaPro 80 Cobra compact ICP etch tool

PlasmaPro 80 Cobra compact ICP etch tool

Compact open-loading tool for plasma etch

PlasmaPro 80 PECVD

PlasmaPro 80 PECVD

Compact open-loading tool for Plasma Enhanced Chemical Vapour Deposition (PECVD)

PlasmaPro 100 ICPCVD System

PlasmaPro 100 ICPCVD System

Designed to produce high quality films with high density plasmas at low deposition pressures and temperatures.

PlasmaPro 100 PECVD System

PlasmaPro 100 PECVD System

Designed to produce excellent uniformity and high rate films, with control of film properties

PlasmaPro 80 ICPCVD system

PlasmaPro 80 ICPCVD system

PlasmaPro 80 Stratum ICPCVD system

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