All key semiconductor manufacturing processes are carried out in high or ultra high vacuum environments. Cryopumps and helium compressors are used extensively to provide high and ultra-high vacuums.
Ultra high vacuum cryopumps offer an inherently clean, oil free high vacuum environment. Oxford Instruments cryopumps present no risk of back-streaming and subsequent contamination, and offer extremely high pumping speeds that allow you to maintain the necessary vacuum during process. Oxford Instruments helium compressors provide a proven and reliable continuous source of high purity helium. Available in high voltage, low voltage, water, and air cooled variants; our helium compressors serve as the central source of ultra high purity helium gas in a closed cycle system.