Semiconductor Electronics

The Semiconductor Electronics market sector encompasses a broad range of applications and technologies. The industry continues to grow and the technologies required evolve, with the ultimate drive to make devices faster, smaller, integrated and ultimately in a more cost effective manner.  

As the industry considers applications that deliver “More than Moore”, at Oxford Instruments our drive to turn smart science into world class products has been at the centre of our developments for both research and development or full scale production customers.  Through partnering with our customers we have been able to develop innovative processes and system solutions.

Products For This Application

Thin film analysis in the SEM: LayerProbe

Thin film analysis in the SEM: LayerProbe

LayerProbe is a thin film analysis tool tool that measures the thickness and composition of multiple layers in thin film structures in the SEM. It is an extension to AZtec EDS analysis.

Thin film analysis in the SEM: LayerProbe

Thin film analysis in the SEM: LayerProbe

LayerProbe is a thin film analysis tool that measures the thickness and composition of multiple layers in thin film structures in the SEM. It is an extension to AZtec EDS analysis.

PlasmaPro 800 large capacity open load RIE

PlasmaPro 800 large capacity open load RIE

Large capacity open-loading process solutions for reactive ion etch

PlasmaPro 800 open load PECVD system

PlasmaPro 800 open load PECVD system

Large capacity open-loading process solutions for PECVD

PlasmaPro 100 RIE System

PlasmaPro 100 RIE System

Delivers anisotropic dry etching for an extensive range of processes

PlasmaPro 100 Cobra ICP Etch

PlasmaPro 100 Cobra ICP Etch

PlasmaPro 100 offers advanced plasma etch and deposition solutions on one platform with loadlock or cassette to cassette for RIE, ICP etch, ICP CVD and PECVD, upto 200mm single wafer platforms or multi-wafer batch capability.

PlasmaPro 100 ICPCVD System

PlasmaPro 100 ICPCVD System

Designed to produce high quality films with high density plasmas at low deposition pressures and temperatures.

PlasmaPro 100 PECVD System

PlasmaPro 100 PECVD System

Designed to produce excellent uniformity and high rate films, with control of film properties

Dr Ziad Melhem of Oxford Instruments NanoScience will be giving a talk at MIT on the enabling technologies, require… https://t.co/MDz2SojzYv
5:21 PM - 16 Feb 18
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