New Frontiers in Plasma Nanopatterning 2012’ Seminar returns on 2nd & 3rd October 2012
09 August 2012

The Molecular Foundry, LBNL, USA & Oxford Instruments Plasma Technology announce their 3rd annual seminar which will once again address the latest research and technologies in plasma etch deposition and growth. Taking place on 2nd and 3rd October 2012, this 1½ day event is at the prestigious Lawrence Berkeley National Laboratory, Berkeley, CA, USA, and will be comprised of presentations, discussions, and a networking lunch, focussing on latest innovations.

“We’ve been hosting these successful seminars worldwide for several years, most recently in Shanghai, China and Caltech, USA and typically attract a large number of participants to each event”, says Stuart Mitchell, VP Sales for Oxford Instruments America Inc, “These workshops are a terrific opportunity for academic and industrial technologists to network and share ideas, and we are delighted to return and assist in this joint workshop with the Molecular Foundry.”

This year’s event, which focuses on atomic level control in deposition, patterning, and analysis, has been divided into two sections to allow participants to benefit from smaller groups sessions in addition to Seminar talks. An afternoon workshop and Cleanroom tours take place on Tuesday 2nd October. These practical group sessions will allow the participant ample opportunity to ask questions and 'hear it from the experts' in an informal forum. Workshop topics will include Plasma Etch, ALD and Nanoanalysis, and will be facilitated by experts from the Molecular Foundry and Oxford Instruments.

On the second day (Wed 3rd) the Seminar takes place, with speakers from key international research institutes, who will discuss their research, and they include: Prof. Erwin Kessels, Technical University Eindhoven; Dr. Tom Sharp, Oxford Instruments Plasma Technology; Dr. Frank Greer, Jet Propulsion Laboratory; Prof. Stacey Bent, Stanford University; Dr. Deirdre Olynick, Molecular Foundry, LBNL; Dr. Dominik Ziegler, Molecular Foundry LBNL; Dr. Alex Weber-Bargioni, Molecular Foundry, LBNL; Dr Markus Maier, Omicron, Dr Xiaodan Gu, University of Massachusetts Amherst, and Dr. Frank Ogletree, Molecular Foundry.

Presentation topics will include:

  • Next-Generation Chemical Mapping on the Nanoscale
  • ALD for single digit nanopatterning
  • Encased AFM cantilevers for biological imaging
  • Controlling deposition in ALD: From continuous films to nanoparticles, and applications in energy conversion
  • ALD in Space
  • Nano Auger Analysis
  • Monolayer controlled deposition for batteries, core-shell nanoparticles, and patterning
  • An Overview of Plasma ALD
  • Block copolymer lithography, etching, and analysis by Grazing Angle X ray diffraction

“The Molecular Foundry is a department of energy funded user facility which provides support to researchers from around the world whose work can benefit from or contribute to nanoscience. Through unparalleled access to state-of-the-art instruments, materials, technical expertise and training, the Foundry provides researchers with the tools to enhance the development and understanding of the synthesis, characterization and theory of nanoscale materials”, Dr Deirdre Olynick, Staff Scientist at LBNL comments, “This event is complementary to the Molecular Foundry User meeting which takes place the same week. We are expecting a high turnout for both events.”

This seminar is free of charge, but must be booked in advance as places are limited. To book a place or receive further information, email: To also attend the Molecular Foundry User meeting, please register here