University of Toronto purchases Next Generation Plasma Etch System for MEMS
19 June 2012

Leader in plasma etch and deposition processing systems, Oxford Instruments Plasma Technology, has won an order for its recently launched PlasmaPro Estrelas100 deep silicon etch tool, from the University of Toronto following a rigorous selection process. The system was purchased for the Emerging Communications Technology Institute (ECTI) in the University’s central micro- and nanofabrication facility, serving academic research and development needs, as well as training functions.

The PlasmaPro Estrelas100 deep silicon etch technology delivers industry leading process performance, and, developed with the R&D market in mind, the system offers the ultimate in process flexibility. Nano and micro structures can be realised as the hardware has been designed with the ability to run Bosch™ and cryo etch technologies in the same chamber.

From smooth sidewall processes to high etch rate cavity etches, the PlasmaPro Estrelas100 has been designed to ensure that the wide range of MEMS applications may be achieved without the need to change the chamber hardware.

Comments Professor Yu Sun, Director of  ECTI, “This advanced tool for MEMS and NEMS will enable ECTI to conduct active interdisciplinary research. The Canada Foundation for Innovation (CFI) funded the purchase and commissioning of a wide variety of important tools including DRIE and other tools for the Centre for Microfluidic Systems in Chemistry and Biology. We chose Oxford Instruments’ PlasmaPro Estrelas100 on equipment quality, performance and capabilities, as well as the excellent system support offered by Oxford Instruments.”

The PlasmaPro Estrelas100 will be used for collaborative research with strategic partners, in key research areas, including nanotechnology and nanofabrication, photonic materials and devices, micro- and nano-electromechanical systems (M/NEMS), biotechnology, micro- and nano-electronic devices, integrated optics, and photovoltaic devices.

“Oxford Instruments Plasma Technology continues to provide technologies that address existing and emerging applications in the MEMS market,” comments Mark Vosloo, Oxford Instruments Plasma Technology Sales & Marketing Director, “With a broad process and application portfolio, our technologies enable many of the applications identified today and those of tomorrow. With over 20 years experience in MEMS R&D we understand the market, and address the needs of our customers to provide them with the most innovative tools available.”