New Range of Upgrades Launched for Plasma and Ion Beam Etch and Deposition Systems
05 November 2012

Oxford Instruments Plasma Technology has recently launched a new range of system upgrade options for their leading-edge etch and deposition tools.

The new range of upgrades includes:

  • The X20 Control System, offering excellent scan speeds and processing resulting in exceptionally accurate control and extremely precise data logging.
  • The Maglev Turbo replaces the current traditional bearing turbo pumps for superior pumping speeds and up to 15% higher throughput. The Maglev Turbo is extremely robust and provides high performance and increased up-time.
  • Etch and deposition end point detection options for achieving optimal process conditions and results. The optical end points enable real-time chamber clean endpoint detection, increasing the availability of the tool, and lowering cost of ownership.

Mark Vosloo, Sales, CS and Marketing Director for Oxford Instruments Plasma Technology comments: “We are committed to providing excellent customer service both pre- and post-sales. This new range of upgrades aims to offer our customers the latest hardware so that they have the opportunity for improved performance and extended lifetime of their Oxford Instruments system.”

These upgrades add to the wide range of options already offered for the Plasmalab, PlasmaPro and Ionfab families of systems.

New Range of Upgrades Launched for Plasma and Ion Beam Etch and Deposition Systems

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