‘Focus on ALD and Ion Beam’, a technical workshop at UCSB with Oxford Instruments
09 October 2013

Continuing their informative and educational series of global plasma seminars and workshops, Oxford Instruments Plasma Technology, together with UC Santa Barbara, CA, USA will hold a technical workshop addressing latest developments in ALD and Ion Beam etch and deposition on 12th November 2013. The 1 day event, hosted by UCSB will include presentations from Users and Oxford Instruments specialists, discussions, a poster session focussing on latest technical innovations, and a networking lunch. Experts from Oxford Instruments & UCSB will present latest process and applications developments, and there will be ample time for discussion.

Presentation topics currently include:

  • An introduction to plasma and thermal ALD techniques
  • ALD hardware developments
  • An introduction to ion beam  technology
  • Ion beam etch – a users perspective
  • Ion beam developments
  • ALD process (Metal & nitride ALD)
  • ALD – a user’s results
  • Ask the experts, Q & A & ion beam & ALD process posters

Bill Mitchell from UCSB said, ”We look forward to this latest workshop with Oxford Instruments, the last one here was extremely well attended and provided a great deal of useful information and advice to our Users and visitors from outside UC Santa Barbara. The mix of fundamentals with more advanced process information in the programme will interest a wide cross section of our community.”

“This workshop is a great opportunity for a wide range of scientists in research and manufacturing to discover practical aspects of ALD and Ion Beam processes, technologies and applications, straight from a leading manufacturer with over 30 years in the industry”, comments Michelle Bourke, Business Group Director at Oxford Instruments Plasma Technology, “Delegates appreciate the informal workshop atmosphere of these events, encouraging delegates to participate through open discussion and sharing their questions and experiences.”

For more details or to register click here.