University of Science and Technology of China orders an additional plasma etching system for quantum information processing
11 August 2014

An additional Oxford Instruments PlasmaPro 100 plasma etch system has recently been ordered by the Center for Micro and Nanoscale Research and Fabrication at the University of Science and Technology of China (USTC) Hefei city, Anhui Province, adding to their already significant installed base of Oxford Instruments leading etch and deposition systems. The systems are installed in USTC’s newly opened cleanroom and will be used for fundamental research into the increasingly important field of quantum information processing. Multiple Oxford Instruments plasma systems, including a PlasmaPro 100 ICP380 and PlasmaPro NGP 80 RIE, and PlasmaPro 100 PECVD deposition tools were already installed in USTC’s new facility during the past year.

“Our latest Oxford Instruments plasma etching system will enhance the cutting edge research capabilities in Quantum Information Processing, currently being undertaken at our excellent new facility.” Said Prof Zhu, from USTC, “We chose Oxford Instruments systems as we have found that they offer extensive process capabilities, and great flexibility, backed by excellent support and service packages. These tools will allow our researchers to push the limits in micro- and nanoscale fundamental research.” Prof Zhu continued, “USTC has a very strong background in both nanoscale science and engineering, and this new state-of-the-art nanofabrication facility aims to drive collaborative, interdisciplinary, and fundamental research in the micro- and nano-scale.”

Comments Dr David Haynes, Sales and Marketing Director for Oxford instruments Plasma Technology, “We are delighted that USTC has placed another order with our company, adding to their suite of our industry leading plasma etch and deposition systems. As well as providing systems for production, our systems are used globally for fundamental research and development, utilising many new and advanced techniques, and having our systems installed at USTC to further quantum computing is great news for us”

Quantum Information Processing will be one of the leading topics at Oxford Instruments’ Nanotechnology Tools 2 day workshop in Beijing from 24-25th September, for more information see:

University of Science and Technology of China orders an additional plasma etching system