University of Alberta nanoFAB facility extends its capabilities with Oxford Instruments plasma systems
09 December 2014

A leading Canadian open access fabrication and characterization facility, the University of Alberta nanoFAB, has recently purchased three Oxford Instruments plasma etch systems. The systems provide upgraded capabilities to the current installed base and ensure that the nanoFAB has state of the art systems, facilitating the growing demand for its top class purpose built cleanroom facility.

The PlasmaPro 100 Estrelas, PlasmaPro 100 Cobra and PlasmaPro 80 PE/RIE dual mode systems will soon be installed in the nanoFAB, offering users a wide range of process options.

The most recent addition to the PlasmaPro family of tools, the PlasmaPro Estrelas100 deep silicon etch technology delivers industry leading process performance, and, developed with the R&D market in mind, the system offers the ultimate in process flexibility. Nano and micro structures can be realised as the hardware has been designed with the ability to run Bosch™ and cryo etch technologies in the same chamber. PlasmaPro 100 Cobra and PlasmaPro 80 PE/RIE systems have equally high specifications, are versatile and eminently suitable for R&D and production needs.

Dr. Eric Flaim, Director of the nanoFAB said, “Over 15 years of operation, the nanoFAB has proven to be a
great learning, R&D and small volume production environment. We strive to enable the highest possible
outcomes for our research and industrial users. Our decision to purchase Oxford Instruments plasma
systems was based on their flexibility, quality and ease of use, in addition to their extensive process offering and ability to scale from research to production.”

In addition, Keith Franklin, Operations Manager at the nanoFAB said, “The customer support we receive is
excellent; from maintenance to user training Oxford Instruments has demonstrated excellent and reliable service from its global support network. As an open access facility we aim to offer our users the broadest range of processing opportunities possible, and these Oxford Instruments systems will be a huge asset.”

University of Alberta nanoFAB facility extends its capabilities with plasma systems