ALD can be used for many applications including:

  • High-k gate oxides
  • Storage capacitor dielectrics
  • Pinhole-free passivation layers for OLEDs and polymers
  • Passivation of crystal silicon solar cells
  • High aspect ratio diffusion barriers for Cu interconnects
  • Adhesion layers
  • Organic semiconductors
  • Highly conformal coatings for microfluidic and MEMS applications
  • Other nanotechnology and nano-electronic applications
  • Coating of nanoporous structures
  • Fuel cells, e.g. single metal coating for catalyst layers
  • Bio MEMS
Catch up on our latest webinar which explores ‘How Ion Beam Deposition enables high power lasers’. View it On Deman…
9:34 AM - 21 Mar 18
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