ALD can be used for many applications including:

  • High-k gate oxides
  • Storage capacitor dielectrics
  • Pinhole-free passivation layers for OLEDs and polymers
  • Passivation of crystal silicon solar cells
  • High aspect ratio diffusion barriers for Cu interconnects
  • Adhesion layers
  • Organic semiconductors
  • Highly conformal coatings for microfluidic and MEMS applications
  • Other nanotechnology and nano-electronic applications
  • Coating of nanoporous structures
  • Fuel cells, e.g. single metal coating for catalyst layers
  • Bio MEMS