Bismuth Telluride (Bi2Te3) Etching
Bi2Te3 has applications in Peltier coolers and in energy harvesting (the conversion of temperature differences into electrical energy). Bi2Te3 and related films may be dry etched using the Inductively Coupled Plasma (ICP) Etch process technique.
These results are for indicative purposes only.
For a detailed process specification please contact your sales representative.