Offering the ultimate flexibility in Deep silicon etching processes

The PlasmaPro 100 Estrelas platform is designed to give total flexibility for Deep Silicon Etch (DSiE) applications - serving a diverse set of process requirements across the Micro Electro Mechanical Systems (MEMS), Advanced Packaging and Nanotechnology markets.

  • Developed with both the research and production markets in mind, the PlasmaPro
    100 Estrelas offers the ultimate in process flexibility. Nano and micro structures can be realised as the hardware has been designed with the ability to run Bosch™ and Cryo etch technologies in the same chamber.
  • From smooth sidewall processes to high etch cavity etches and high aspect ratio processes to tapered via etches, the PlasmaPro 100 Estrelas has been designed to ensure that the wide range of applications in MEMS, advanced packaging and nanotechnology can be realised without the need to change chamber hardware.

Superior Technical Capabilities

  • Compatible with 50mm to 200mm substrates, ensuring that you have the ability to develop devices that can be taken to production using the same chamber hardware
  • Mechanical or electrostatic clamping
  • Heated liners
  • Improved reproducibility
  • Increased mean time between cleans (MTBC)
  • Fast-acting close coupled MFCs with fast control (originally developed for ALD)
  • Reduced chamber volume and high throughput pumping ensuring high gas conductance
  • Higher flow MFCs and associated generators for high radical densities
  • Auto match for process flexibility
  • Sub-second Bosch switching times (patent pending)
  • Low Cost of Ownership through optimised hardware and process control
  • Low exposed area (<1%) end point capability

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PlasmaPro 100 Estrelas Brochure

Deep Silicon Etch System

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Estrelas Image Gallery

Related Processes

Bosch  Deep Silicon Etching

Bosch Deep Silicon Etching

Bosch Deep Silicon Etching

Si Mixed Etch

Si Mixed Etch

Silicon (Si) Mixed Etching

Si Cryo Etch

Si Cryo Etch

Silicon Cryogenic Etching

Tool Support

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