Nanofab for Nanoscale GrowthThe Nanofab® delivers high performance growth of nanomaterials with in-situ catalyst activation and rigorous process control

  • Cold wall design with showerhead based uniform precursor delivery
  • Plasma enhancement options: In chamber (CCP) or remote plasma (ICP)
  • Vacuum load lock for quick sample exchange
  • Excellent temperature uniformity
  • Optional liquid/solid source delivery system for growth of MoS2,MoSe2 and other TMDCs
  • Variable sample sizes from small pieces up to maximum 200mm wafers
  • Multiple view ports for in-situ characterisation (OES, Ellipsometry etc.)
  • Options of a 700°C, 800°C or 1200°C table
  • Processes for Nanomaterials: 1D and 2D nanostructures

Nanofab system features

Table Size Up to 200mm wafer Table Temperature Range Up to 1200°C
Load lock Installed O2 atmosphere compatibility (<400°C) Compatible
Liquid Precursor Compatibility Compatible O2 atmosphere compatibility (>400°C) Non-Compatible
Generator Frequency Range RF (13.56MHz), LF (50-460KHz) Extra power supply for installation Required
General PECVD Process Oxide, Nitride, Oxynitride, a-Si Extra gasline for installation Required
Catalyst Pretreatment Capable Process for Nanomaterials Carbon Nanotubes, Si Nanowires

 

Download the product brochure

Nanofab Brochure

CVD/PECVD tools for growth of 1D/2D nanomaterials and heterostructures

PDF 758KB

Related Process Techniques

Nanoscale Growth

Nanoscale Growth

CVD, PECVD and ICP CVD for growth of nanomaterials

Tool Support

Dry Pump N2 Standby Mode

Dry Pump N2 Standby Mode

Get the dry pump N2 standby mode upgrade to save energy & nitrogen

Gas Pod

Gas Pod

Our upgraded gas pods have the capability of being able to incorporate extra gas lines, allowing the user great flexibility.

Optical End Point Detectors

Optical End Point Detectors

Optical end point detection Upgrades for etch & deposition tools

TEOS Liquid Level Sensing

TEOS Liquid Level Sensing

Upgrade to existing TEOS liquid delivery modules

Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump

Turbomolecular Vacuum Pump Upgrade